FPD STAGE 1
Work area: Module 46"~57" (Dual Chuck Stage)
Guide: LM Guide
Application motor
Coreless Type Linear Motor
Controller: ACS & U-mac
Key Features
- Superior speed stability: Scan motion
- High rigidity and stable system
- Ensure high degree of mechanism and control
- Efficient space utilization
- Anti-vibration design for micro vibration
FPD STAGE 2
Work area: 6 ~ 8 Generation
Guide: LM Guide
Application motor
Core Type Linear Motor
Controller: ACS & U-mac
Key Features
- Ensuring excellent speed stability: P to P
- High rigidity and stable system
- Ensure high degree of mechanism and control performance
- Efficient space utilization
- Anti-vibration design for micro vibration
FPD STAGE 3
Work area: 4 ~ 7.5 Generation
Guide: LM Guide
Application motor
Coreless Type Linear Motor
Controller: ACS & U-mac
Key Features
- Superior speed stability: Scan motion
- High rigidity and stable system
- Ensure high degree of mechanism and control performance
- Efficient space utilization
- Anti-vibration design for micro vibration
FPD STAGE 4
Work area: OLED Sealing
Guide: LM Guide
Applicable motor (57-Axis)
Coreless Type Linear Motor
Controller: ACS & U-mac
Key Features
- Superior speed stability: Scan motion
- High rigidity and stable system
- Ensure high degree of mechanism and control performance
- Efficient space utilization
- Anti-vibration design for micro vibration
