Resistance-Control Porous Ceramic Manufacturing Technology

Resistance-Control Porous Ceramic Vacuum Chuck Manufacturing Technology

Part Manufacturing Technology using Ceramics

Anti-Static Porous Ceramics (Patent 10-1692219)

· It can be applied to Air Bearings, Ceramic Chucks and Air Floating Systems for FPD and Semiconductor by controlling Pore Size (1~20 ㎛) and Porosity (10~48%)

Ceramic Air Bearing and Ceramic Chuck

Homogeneous Pore Distribution enables High-Precision Floating and Chucking

Vibration on Precision Floating: less than 5 ㎛

No Particle Issue (due to High Temp. Sintering Process)