Precision Motion Stage for FPD/Semiconductor
Bearing Type of Stage: Air Bearing System
Laser Applications
· Laser System: Cutting Head + Scanner System
Ultra Precision Air-bearing Stages
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Implementation of long travel without decline performance
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Improve a flatness and pitch angle error combine porous Air Bearing Stage and vacuum
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Dynamic yaw and straightness calibration from measurement
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Higher Dynamic Stiffness / High Load Capacity
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Ultra-precision Accuracy and Repeatability
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Application : LCD&OLED Laser process, Memory Repair, Inspection, Micro Machining
Ultra Precision
Air-bearing Stages
■ SiC (Silicon Carbide) Ceramic based Motion Stage
■ Type of Bearing / Scale / Isolation System
- · Bearing : Air/Vacuum Combination Air Bearing System
- · Scale : Laser Scale
- · Isolation System : Active
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SiC Ceramic Based Stage
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Air-vacuum combination Air-bearing system
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Bf1 Laser Scale , Active isolation system
